FEI DualBeam FIBs: Nova NanoLab 200 (UNSW) & Helios NanoLab (Adelaide)

FEI Nova Nanolab 200 DualBeam FIB


Advanced microscopy platform comprising high-performance electron and ion columns and analytical detectors for use in 2D and 3D microscopy, materials modification and fabrication of insulators, metals and semiconducting materials.

  • Implantation and nano-machining
  • Quantum Dots and arrays
  • Precise Surface Reconstructions
  • Select chemically regions for machining
  • Alternate between imaging and nanomilling
  • Single atom implantation, device prototyping or selective alloying


FIB UNSW flagship example image

Preparation of TEM specimen on interface between electrode and electrolyte in a fuel cell, resulting in an ultrathin section across electrode/electrolyte interface.

  • Nanoscale metrology: characterisation of micro devices (e.g.) recording heads, quantum computer, photonics, semiconductors
  • Engineering materials: new insights


  • Dual-beam, featuring a scanning electron microscope
  • Focussed Ga source for ion machining and milling
  • Multi-source
  • Analytical capability (EDXS, EBSD)
  • Ion energy range: 5-30 keV
  • Ion beam current range: 1 pA to 20 nA
  • Ion beam min. diameter: approx. 10 nm
  • Electron column energy range: 0.5-30 keV
  • Electron column imaging resolution: 1 nm


Electron Microscope Unit, The University of New South Wales
Dr Charlie Kong, Research Associate
Tel: 02 9385 6395
Email: c.kong@unsw.edu.au

FEI Helios NanoLab DualBeam FIB


Nanofabrication. Image courtesy of FEI Company.

The next-generation focused ion beam / field-emission SEM instrument provides a platform for sub-nanometre resolution imaging with innovative machining capability. The instrument provides leading-edge capability with novel solutions to difficult sample preparation, 2-D and 3-D nanoanalysis and prototyping, and it adds to the nations capacity for this technology.

Applications include micro-machining and analysis of renewable energy ’sliver’ technologies, applications for the defence industries, and in the prototype manufacture of laser hydrophones.


Adelaide Microscopy, The University of Adelaide
South Australian Regional Facility (SARF)
Dr Len Green, DualBeam Engineer
Tel: 08 8303 5855
Email: len.green@adelaide.edu.au